TY  - BOOK
AU  - Evgeni Gusev, Eric Garfunkel, Arthur Dideikin
TI  - Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators
SN  - 9789048138074
PY  - 2010///
PB  - Springer Netherlands
KW  - Physics and Astronomy
UR  - https://doi.org/10.1007/978-90-481-3807-4
ER  -