TY  - BOOK
AU  - E. A. Deulin, V. P. Mikhailov, Yu V. Panfilov, R. A. Nevshupa
TI  - Mechanics and Physics of Precise Vacuum Mechanisms
SN  - 9789048125203
PY  - 2010///
PB  - Springer Netherlands
KW  - Physics and Astronomy
UR  - https://doi.org/10.1007/978-90-481-2520-3
ER  -