TY  - BOOK
AU  - María Ángela Pampillón Arce
TI  - Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets
SN  - 9783319666075
PY  - 2017///
PB  - Springer International Publishing
KW  - Physics and Astronomy
UR  - https://doi.org/10.1007/978-3-319-66607-5
ER  -