TY - DATA AU - Ghoussoub, Nassif. AU - Guo, Yujin. TI - Mathematical analysis of partial differential equations modeling electrostatic MEMS T2 - Courant Lecture Notes, SN - 9781470417635 (online) PY - 2010/// CY - Providence, R.I. PB - American Mathematical Society KW - Mathematical analysis KW - Microelectromechanical systems N1 - Includes bibliographical references (p. 309-215) and index UR - https://doi.org/10.1090/cln/020 ER -