TY  - DATA
AU  - V.Z. Feinberg, A.G. Levin, E.B. Rabinovich
TI  - VLSI Planarization
SN  - 9789401157407
PY  - 1997///
PB  - Springer Netherlands
KW  - Mathematics and Statistics
UR  - https://doi.org/10.1007/978-94-011-5740-7
ER  -