000			00458nam a2200145Ia 4500
008			230130s9999||||xx |||||||||||||| ||und||
020			_a9783662496831
100			_aZhiqiang Li
245		4	_aThe Source/Drain Engineering of Nanoscale Germanium-based MOS Devices
250			_a1st ed. 2016
260			_bSpringer Berlin Heidelberg _c2016
440			_aSpringer Theses
650			_aPhysics and Astronomy
856			_uhttps://doi.org/10.1007/978-3-662-49683-1
999			_c14624 _d14624