000			00422nam a2200145Ia 4500
008			230130s9999||||xx |||||||||||||| ||und||
020			_a9783642241727
100			_aTakashi Yatsui
245		0	_aNanophotonic Fabrication
250			_a2012
260			_bSpringer Berlin Heidelberg _c2012
440			_aNano-Optics and Nanophotonics
650			_aPhysics and Astronomy
856			_uhttps://doi.org/10.1007/978-3-642-24172-7
999			_c14926 _d14926