000 00462nam a2200145Ia 4500
008 230130s9999||||xx |||||||||||||| ||und||
020 _a9783319335612
100 _aWerner Wesch, Elke Wendler
245 0 _aIon Beam Modification of Solids
250 _a1st ed. 2016
260 _bSpringer International Publishing
_c2016
440 _aSpringer Series in Surface Sciences
650 _aPhysics and Astronomy
856 _uhttps://doi.org/10.1007/978-3-319-33561-2
999 _c17072
_d17072