000			00381nam a2200133Ia 4500
008			230130s9999||||xx |||||||||||||| ||und||
020			_a9783540719250
100			_aHelmut Liebl
245		0	_aApplied Charged Particle Optics
250			_a2008
260			_bSpringer Berlin Heidelberg _c2008
650			_aPhysics and Astronomy
856			_uhttps://doi.org/10.1007/978-3-540-71925-0
999			_c17665 _d17665