000			00483nam a2200145Ia 4500
008			230130s9999||||xx |||||||||||||| ||und||
020			_a9783319020815
100			_aRosa Córdoba Castillo
245		0	_aFunctional Nanostructures Fabricated by Focused Electron/Ion Beam Induced Deposition
250			_a2014
260			_bSpringer International Publishing _c2014
440			_aSpringer Theses
650			_aPhysics and Astronomy
856			_uhttps://doi.org/10.1007/978-3-319-02081-5
999			_c17720 _d17720