000			00504nam a2200145Ia 4500
008			230130s9999||||xx |||||||||||||| ||und||
020			_a9783319666075
100			_aMaría Ángela Pampillón Arce
245		0	_aGrowth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets
250			_a1st ed. 2017
260			_bSpringer International Publishing _c2017
440			_aSpringer Theses
650			_aPhysics and Astronomy
856			_uhttps://doi.org/10.1007/978-3-319-66607-5
999			_c17887 _d17887