000 00410nmm a2200145Ia 4500
008 230202s9999||||xx |||||||||||||||||und||
020 _a9783540356714
100 _aC. K. Rhodes
245 0 _aExcimer Lasers
250 _a2nd ed. 1984
260 _bSpringer Berlin Heidelberg
_c1984
440 _aTopics in Applied Physics
650 _aPhysics and Astronomy
856 _uhttps://doi.org/10.1007/3-540-13013-6
999 _c25563
_d25563