000			00712nmm a2200181Ia 4500
008			230426s9999||||xx |||||||||||||||||und||
020			_a9781470417635 (online)
245		0	_aMathematical analysis of partial differential equations modeling electrostatic MEMS
260			_aProvidence, R.I. : _bAmerican Mathematical Society, _c2010.
300			_a1 online resource (xiii, 318 p. : ill.)
490			_aCourant Lecture Notes, _vv. 20 _x2472-4467 ;
504			_aIncludes bibliographical references (p. 309-215) and index.
650			_aMathematical analysis.
650			_aMicroelectromechanical systems
700			_aGhoussoub, Nassif.
700			_aGuo, Yujin.
856			_uhttps://doi.org/10.1090/cln/020
999			_c31917 _d31917